Spectroscopin Ellipsometry; Effective Medium Theory; Line-and-Space; Composite Thin Film
Issue Date
2003-06
Publisher
한국반도체장비학회
Citation
한국반도체장비학회지, v. 2, no. 2, page. 1-4
Abstract
We have developed a rotating compensator spectroscopic ellipsometer (RCSE). As the ellipsometry measures a change in the polarization state of a light wave upon non-normal reflection from surface, the degree of sensitivity is enhanced greatly through the detection of relative phase change. RCSE acquires additional information from the non-ideal surface of sample and operates over the photon energy range from 1.5 to 4.5 eV. We applied RCSE to measure the optical properties of films and the line-width of patterned PR films on crystalline silicon.