Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안일신 | - |
dc.date.accessioned | 2020-11-26T01:15:57Z | - |
dc.date.available | 2020-11-26T01:15:57Z | - |
dc.date.issued | 2003-06 | - |
dc.identifier.citation | 한국반도체장비학회지, v. 2, no. 2, page. 1-4 | en_US |
dc.identifier.uri | https://scienceon.kisti.re.kr/srch/selectPORSrchArticle.do?cn=JAKO200311923081527 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/155921 | - |
dc.description.abstract | We have developed a rotating compensator spectroscopic ellipsometer (RCSE). As the ellipsometry measures a change in the polarization state of a light wave upon non-normal reflection from surface, the degree of sensitivity is enhanced greatly through the detection of relative phase change. RCSE acquires additional information from the non-ideal surface of sample and operates over the photon energy range from 1.5 to 4.5 eV. We applied RCSE to measure the optical properties of films and the line-width of patterned PR films on crystalline silicon. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국반도체장비학회 | en_US |
dc.subject | Spectroscopin Ellipsometry | en_US |
dc.subject | Effective Medium Theory | en_US |
dc.subject | Line-and-Space | en_US |
dc.subject | Composite Thin Film | en_US |
dc.title | Rotating Compensator Spectroscopic Ellipsometer 의 개발 및 응용 | en_US |
dc.title.alternative | Development and Application of Rotating Compensator Spectroscopic Ellipsometer | en_US |
dc.type | Article | en_US |
dc.relation.journal | 한국반도체장비학회지 | - |
dc.contributor.googleauthor | 이재호 | - |
dc.contributor.googleauthor | 방경윤 | - |
dc.contributor.googleauthor | 박준택 | - |
dc.contributor.googleauthor | 오혜근 | - |
dc.contributor.googleauthor | 안일신 | - |
dc.relation.code | 2012210661 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF PHOTONICS AND NANOELECTRONICS | - |
dc.identifier.pid | ilsin | - |
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