Effects of lattice mismatch in ZnO/Substrate structures on the orientation of ZnO films and the characteristics of SAW devices
- Title
- Effects of lattice mismatch in ZnO/Substrate structures on the orientation of ZnO films and the characteristics of SAW devices
- Author
- 박진석
- Keywords
- ZnO film and multilayer; C-axis preferred orientation; Crystallite size; Lattice mismatch; SAW device; Insertion loss
- Issue Date
- 2004-01
- Publisher
- Elsevier B.V.
- Citation
- Thin Solid Films, v. 447-448, page. 296-301
- Abstract
- Polycrystalline ZnO films are deposited using RF magnetron sputtering on various substrate materials including AlN/Si-(111), sapphire, DLC/Si-(100), SiO2/Si-(100) and Si-(111). The structural parameters of deposited ZnO films, such as texture coefficient (TC) value for (002)-orientation, crystallite size and full-width at half-maximum (FWHM) at ZnO (002)-peak, are compared. Surface acoustic wave (SAW) devices are also fabricated by using a lift-off method, with the configuration of IDT/ZnO/substrate. The frequency response characteristics (including S21) of the fabricated SAW devices are measured and the device parameters, such as insertion losses and side-lobe rejection level, are estimated in terms of the substrate materials. Experimental results indicate that the lattice matching as well as the structural similarity between ZnO and substrate may be essential for determining the SAW device characteristics.
- URI
- https://www.sciencedirect.com/science/article/pii/S0040609003010678https://repository.hanyang.ac.kr/handle/20.500.11754/155429
- ISSN
- 0040-6090
- DOI
- 10.1016/S0040-6090(03)01067-8
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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