스핀 코터 시스템의 진동 저감을 위한 3차원 모델링과 민감도 해석
- Title
- 스핀 코터 시스템의 진동 저감을 위한 3차원 모델링과 민감도 해석
- Other Titles
- 3 Dimensional Modeling and Sensitivity Analysis for Vibration Reduction of the Spin-Coater System
- Author
- 한창수
- Keywords
- spin-coater; vibration; system modeling; model verification; sensitivity analysis; natural frequency
- Issue Date
- 2001-10
- Publisher
- Institute of Control, Robotics and Systems
- Citation
- 제어로봇시스템학회 국제학술대회 논문집, Page.2436-2440
- Abstract
- In this paper, the dynamic system modeling and the state sensitivity analysis of the spin-coater system for the reduction of
the vibration are proposed. In the respect of modeling, the spin-coater system is composed of components of servomotor, belt,
spindle, and a supported base. Each component is defined and combined modeling is derived to 3 dimensional equations.
Verification of modeling is verified by experimental values of actual system in the frequency domain. By direct differentiation the
constraint equations with respect to kinematic design variables, such as eccentricity of spindle, moment of inertia, torsional stiffness
and damping of supported base, sensitivity equations are derived to the verified state equations. Sensitivity of design variables could
be used for vibration reduction and natural frequency shift in the frequency domain. Finally, dominant design variables could be
selected based on the sensitivity analysis.
- URI
- http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE02045097?https://repository.hanyang.ac.kr/handle/20.500.11754/155037
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ROBOT ENGINEERING(로봇공학과) > Articles
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