Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김옥경 | - |
dc.date.accessioned | 2020-09-29T00:05:05Z | - |
dc.date.available | 2020-09-29T00:05:05Z | - |
dc.date.issued | 2004-12 | - |
dc.identifier.citation | 이학기술연구지, v.7, Page.29-34 | en_US |
dc.identifier.uri | http://www.riss.kr/search/detail/DetailView.do?p_mat_type=1a0202e37d52c72d&control_no=d437388dc94833a1ffe0bdc3ef48d419&outLink=N | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/154211 | - |
dc.description.abstract | We make real-time spectroscopic rotating compensator ellipsometer for real time measurement and in-situ measurement. We study a method to make Poly silicon after depositing amomhous silicon thin film by dc sputter system at different temperature and pressure. Amorphous silicon films of 30㎚ thickness were deposited on the Ni substrate, and then ITO films of 20㎚ thickness were deposited on the a-Si films. The sampie were crystallized below 300℃ in the electric field applied between the Ni and ITO. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한양대학교 이학기술연구소 | en_US |
dc.title | 실시간 분광 엘립소메트리를 이용한 a-Si박막의 crystallization 현상 연구 | en_US |
dc.title.alternative | Study of crystallization for amorphous silicon using real-time spectroscopic ellipsometry | en_US |
dc.type | Article | en_US |
dc.relation.journal | 이학기술연구지 | - |
dc.contributor.googleauthor | 오영록 | - |
dc.contributor.googleauthor | 최은호 | - |
dc.contributor.googleauthor | 이기용 | - |
dc.contributor.googleauthor | 방경윤 | - |
dc.contributor.googleauthor | 안일신 | - |
dc.contributor.googleauthor | 김옥경 | - |
dc.relation.code | 2012101941 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF APPLIED PHYSICS | - |
dc.identifier.pid | 1790146 | - |
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