새로운 나노전사몰딩법을 이용한 실버 패턴 형성에 관한 연구

Abstract

A new direct patterning method of Silver thin film : Liquid bridge mediated Nano transfer molding

Kwak, Eun Bee Dept. of Chemistry The Graduate School Hanyang University

Patterning is central to modern science and technology. Typical applications include microelectronics, micro electro mechanical systems (MEMS), biological and chemical sensors, microfluidics, display units, and optoelectronic devices. Among existing patterning methods, direct printing of functional materials is the most efficient method to fabricate new types of structures and devices at low cost and low environmental impact.. In recent years, Among Several fabrication techniques, This Liquid bridge mediated nano transfer molding is a soft lithographic method where a drop of liquid ink, is filled to the depressed surface of the mold and the excess ink is removed. The mold is then placed in contact with a substrate. And the liquid ink is caused to solidify in situ heated. After the liquid has cured to solid, the mold is contact to substrate with liquid layer. After liquid is perfectly dried, stamp peeled away from substrate, and then leaving array of a cured micro/nano sized structures on the substrate. This method can be adopted in automated roll to roll printing machines that are used to generate metal patterns with a side range of feature size. Metal patterns transferred using the method were used for various application such as electrode, sensor, diode, solar cell..etc.