분자층증착법을 이용한 새로운 형태의 유무기 복합박막의 제조

Abstract

New materials are required for the next generation devices. One of the ways to fabricate new materials is the hybridization of existing materials having different properties. The hybrid materials mixed by organic and inorganic components are expected to have combined properties both of organic parts, such as flexibility and functionality, and of inorganic parts, such as stability and high electrical or optical performance. In addition, the hybrid materials are expected to have synergic effects which are not shown in just one component.

Herein, we fabricated new types of organic-inorganic hybrid thin films by molecular layer deposition. The hybrid thin films were made by sequential surface reactions of metal alkyls and bifunctional monomers. Diethyl zinc and 2,4-hexadiyne-1,6-diol are used as an inorganic precursor and an organic precursor, respectively, in order to fabricate poly(zinc diacetylene). Using Raman, XPS and TEM analysis, the microstructure and compositions of the hybrid films were examined. And, the electric and optical properties were analyzed by a TFT fabrication and photoluminescence spectroscopy, respectively. The high performance of TFTs, on/off ratio of over 10^7 and saturation electron mobility of over 10 cm^2/V·s, and the low temperature process indicate the possible use of the hybrid films to flexible devices.