나노 입자의 합성과 미세패터닝,그리고 (바이오)센싱 소자로의 응용

Abstract

Nanoparticles are of considerable interest for their unique properties and their potential for use in a variety of applications. Metal nanoparticles are of particular interest because of great promise for heterogeneous catalysis. As a result, they can be processed into thin films for device applications. We refer to the fabrication of metal nanoparticles on the single-walled carbon nanotube (SWCNT) thin film due to the transparent, flexible, and stable as well as the high conductivity of carbon nanotube. In this thesis, we described a method that allows the fabrication of metal nanoparticles on the single-walled carbon nanotube film and demonstrated their application as electrochemical sensor. First, we introduce a method for precise, controllable patterning nanoparticles on SWCNT film using electrochemical deposition. The process includes the fabrication of SWCNT film by vacuum filtration method and the patterning of photoresist polymer by photolithography. Subsequently, the metal nanoparticles are deposited on the pre-pattern SWCNT film by electrochemical deposition method. The patterned SWCNT thin film of gold nanoparticles and silver particles are used as substrate for surface enhanced Raman scattering (SERS) and electrochemical sensors for the detection of glucose, hydroxylamine, and hydrogen peroxide. Furthermore, we demonstrated a method for ultra-sensitive DNA detection based on the aggregated-gold nanoparticles as enhancing factor using atomic force micrscopy. Finally, the droplet-based microfluidic platform with concentration gradient generation was studied. The device is used to perform enzyme kinetics measurement of β-galactosidase enzyme catalyzing resorufin-β-D-galactopyranoside (RBG). Thanks to the electrochemical detection method, the catalytic activity of metal nanoparticles, the remarkable properties of SWCNT film, and the scalability of microfluidic. Our results open perspectives for a fully-integrated electrochemical detection platform for diagnostics.