자기조립 방법을 통해 형성된 유기-무기 복합 다층박막의 마이크로패터닝

Abstract

Multilayered films prepared by layer-by-layer (LbL) deposition are promising candidates for a wide variety of applications such as electronic and optical devices, superhydrophobic surfaces, and biochemical sensors. Polyelectrolyte mutilayers (PEMs) composed of poly(ethyleneimine) (PEI)[poly(allylamine hydrochloride) (PAH)/ poly(sodium 4-styrenesulfonate) (PSS)]n were grown as a function of dip and spin cycle of (PSS/PAH) bilayers. UV absorbance at 226 nm corresponding to PSS was proportionally increased with increasing the number of bilayers. Atomic force microscopy (AFM) study revealed that surface morphology was changed before and after surface modification using PEMs. A polydimethylsiloxane (PDMS) was patterned with a master using conventional photolithography, and micropatterened PEM films containing (PAH/PSS)n bilayers were successfully prepared onto the PDMS surface using dip or spin self-assembly (SA) methods. The micropatterened PEM films were directly transferred to silicon surface with a sharp edge structure, which were conformed by atomic force microscopy measurements. In addition, organic-inorganic hybrid films have attracted considerable attention in the materials science community because of their ability to combine distinct properties of organic and inorganic components within one film. The patterning of organic-inorganic multilayer films is highly required for practical application in material science and nanotechnology. The main purpose of this study is to develop the patterning process of hybrid multilayer films on solid surfaces. Hybrid mutilayers composed of poly(ethyleneimine) (PEI)[Ag nanoparticles (Ag NP)/poly(allylamine hydrochloride) (PAH)]n were grown as a function of dip and spin cycle of (Ag NP/PAH) bilayers. UV absorbance at approximately 390 nm corresponding to Ag NP was proportionally increased with increasing the number of bilayers. The micropatterened PAH/Ag NP hybrid films were successfully prepared onto the PDMS surface using dip self-assembly (SA) methods and the micropatterened PAH/Ag NP hybrid films were directly transferred to silicon surface with a sharp edge structure, which were conformed by AFM. We also successfully prepared titania/poly(acrylic acid) (PAA) nanocomposite multilayer films using LbL. Sol-gel process from metal alkoxide and polymer solutions. UV absorbance at 250 nm corresponding to titania layers was proportionally increased with increasing the number of bilayers. The micropatterened PAA/TiO2 hybrid films were successfully prepared onto the PDMS surface using sol-gel reaction and The hybrid films were directly transferred to silicon surface with a sharp edge structure, which were conformed by AFM. From this study, we formed that various micropatterned can be farbricated using LBL and transfer printing multilayer techniques.