Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 심광보 | - |
dc.date.accessioned | 2019-12-04T06:46:58Z | - |
dc.date.available | 2019-12-04T06:46:58Z | - |
dc.date.issued | 2018-02 | - |
dc.identifier.citation | 한국재료학회지, v. 28, no. 2, page. 75-81 | en_US |
dc.identifier.issn | 1225-0562 | - |
dc.identifier.issn | 2287-7258 | - |
dc.identifier.uri | http://journal.mrs-k.or.kr/journal/article.php?code=59025 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/117302 | - |
dc.description.abstract | An ultra-high temperature ceramic, tantalum carbide, has received much attention for its favorable characteristics: a superior melting point and chemical compatibility with carbon and other carbides. One drawback is the high temperature erosion of carbon/carbon (C/C) composites. To address this drawback, we deposited TaC on C/C with silicon carbide as an intermediate layer. Prior to the TaC deposition, the TaCl5-C3H6-H2 system was thermodynamically analyzed with FactSage 6.2 and compared with the TaCl5-CH4-H2 system. The results confirmed that the TaCl5-C3H6-H2 system had a more realistic cost and deposition efficiency than TaCl5-CH4-H2. A dense and uniform TaC layer was successfully deposited under conditions of Ta/C = 0.5, 1200 oC and 100 torr. This study verified that the thermodynamic analysis is appropriate as a guide and prerequisite for carbide deposition. | en_US |
dc.description.sponsorship | This work was supported by the Korea Government(Ministry of Trade, Industry and Energy, MOTIE and Defense Acquisition Program Adminstration, DAPA) through Institute of Civil-Military Technology Cooperation. | en_US |
dc.language.iso | ko_KR | en_US |
dc.publisher | 한국재료학회 | en_US |
dc.subject | tantalum carbide | en_US |
dc.subject | erosion of C/C composite | en_US |
dc.subject | thermodynamic analysis | en_US |
dc.subject | chemical vapor deposition | en_US |
dc.title | TaCl5-C3H6-H2 계에서 TaC CVD 공정의 열역학 해석 | en_US |
dc.title.alternative | Thermodynamic Prediction of TaC CVD Process in TaCl5-C3H6-H2 System | en_US |
dc.type | Article | en_US |
dc.relation.no | 2 | - |
dc.relation.volume | 28 | - |
dc.identifier.doi | 10.3740/MRSK.2018.28.2.75 | - |
dc.relation.page | 75-81 | - |
dc.relation.journal | 한국재료학회지 | - |
dc.contributor.googleauthor | 김현미 | - |
dc.contributor.googleauthor | 최균 | - |
dc.contributor.googleauthor | 심광보 | - |
dc.contributor.googleauthor | 조남춘 | - |
dc.contributor.googleauthor | 박종규 | - |
dc.contributor.googleauthor | Kim, Hyun-Mi | - |
dc.contributor.googleauthor | Choi, Kyoon | - |
dc.contributor.googleauthor | Shim, Kwang-Bo | - |
dc.contributor.googleauthor | Cho, Nam-Choon | - |
dc.contributor.googleauthor | Park, Jong-Kyoo | - |
dc.relation.code | 2018019310 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE AND ENGINEERING | - |
dc.identifier.pid | kbshim | - |
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