Performance Improvement of p-Channel Tin Monoxide Transistors with a Solution-Processed Zirconium Oxide Gate Dielectric
- Title
- Performance Improvement of p-Channel Tin Monoxide Transistors with a Solution-Processed Zirconium Oxide Gate Dielectric
- Author
- 정재경
- Keywords
- ZrO2 gate dielectric; spin cast; tin monoxide; p-type semiconductor; thin-film transistors
- Issue Date
- 2017-11
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Citation
- IEEE ELECTRON DEVICE LETTERS, v. 38, no. 11, page. 1543-1546
- Abstract
- This letter reports the fabrication of p-channel tin monoxide (SnO) thin-film transistors (TFTs) with a highpermittivity zirconiumoxide (ZrO2) gate insulatorfilm, which were prepared by a low-cost spin-cast method. The spincast ZrO2 dielectrics exhibit a low leakage current density of 4.5x10(-8) A/cm(2) at 1 MV/cm. Introducing the ZrO2 dielectric in top-typeSnOTFTs allows for a reduction in the driving gate voltage range from 80 to 10 V, ascomparedwith devices with a thermal SiO2 gate insulator. Additionally, a high fieldeffect mobility of 2.5 cm(2)/Vs and an ION/OFF of 3 x10(3) were preserved.
- URI
- https://ieeexplore.ieee.org/document/8055568https://repository.hanyang.ac.kr/handle/20.500.11754/116354
- ISSN
- 0741-3106; 1558-0563
- DOI
- 10.1109/LED.2017.2758349
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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