Analysis and monitoring of mode transitions during afm nanomachining of IZO-Coated pyrex glass
- Title
- Analysis and monitoring of mode transitions during afm nanomachining of IZO-Coated pyrex glass
- Author
- 안유민
- Keywords
- AFM nanomachining; acoustic emission monitoring; crack initiation; IZO-coated Pyrex glass; ploughing
- Issue Date
- 2019-05
- Publisher
- TAYLOR & FRANCIS INC
- Citation
- MACHINING SCIENCE AND TECHNOLOGY, v. 23, No. 1, Page. 39-56
- Abstract
- The goal of this research is to investigate and monitor machining mode transitions during nanoscale scratching of IZO-coated Pyrex glasses using atomic force microscope (AFM). Among the AFM nanomachining mode features, which include elastic/plastic deformations and crack generation, pile-up (by ploughing) is a key surface phenomenon that can represent plastic deformation characteristics, such as a sign of chip making. Moreover, because the pile-up formation mechanism of coated materials is reported to be distinct from that of bulk materials, the examination of pile-up in coated materials is challenging, along with brittle transition (crack initiation). In this research, the pile-up formation and crack initiation, that occur during nanoscratching, were examined and analyzed near the coating-substrate (glass) boundary. In addition, acoustic emission (AE), a sensing scheme with nanoscale sensitivity, was introduced to detect significant machining state variations and mode transitions. Experimental and analysis results indicate that the proposed scheme is viable for characterizing/monitoring the nanoscale machining of coated materials.
- URI
- https://www.tandfonline.com/doi/full/10.1080/10910344.2018.1449218https://repository.hanyang.ac.kr/handle/20.500.11754/114748
- ISSN
- 1091-0344; 1532-2483
- DOI
- 10.1080/10910344.2018.1449218
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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