Effects of Pb content and electrode materials on the ferroelectric properties of Pb(Zr0.52Ti0.48)O-3 thin films
- Title
- Effects of Pb content and electrode materials on the ferroelectric properties of Pb(Zr0.52Ti0.48)O-3 thin films
- Author
- 강보수
- Keywords
- PZT; Pb content; Electrode; Fatigue; Retention
- Issue Date
- 2019-04
- Publisher
- ELSEVIER SCIENCE SA
- Citation
- JOURNAL OF ALLOYS AND COMPOUNDS, v. 781, Page. 1028-1032
- Abstract
- We investigated the effects of Pb content and electrode materials on the ferroelectric properties of metal/ Pb(Zr0.52Ti0.48)O-3/metal thin film capacitors for non-volatile memory device applications. The increase of Pb content resulted in a change from the non-ferroelectric pyrochlore phase to the ferroelectric perovskite phase, and consequently, the enhancement of polarization-voltage hysteresis loops. Non-noble metal/PZT/noble metal asymmetric electrode structures were fabricated by using non-noble metals and a noble metal with different work functions. The asymmetric electrode and the resultant internal field, not only made a shift in the initial hysteresis loops, but also caused continuous degradation of the reliability characteristics of ferroelectric capacitors. (C) 2018 Elsevier B.V. All rights reserved.
- URI
- https://www.sciencedirect.com/science/article/pii/S0925838818347029https://repository.hanyang.ac.kr/handle/20.500.11754/113224
- ISSN
- 0925-8388; 1873-4669
- DOI
- 10.1016/j.jallcom.2018.12.155
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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