초정밀 위치 결정 장치에 관한 연구

Abstract

Recently PZT is used in ultra precision mechanism field. PZT itself has a small driving range although it has a high resolution. Many methods, such as inchworm, impact driving, inertial sliding method, etc., have been applied for moving range expansion. In this study, a new actuating mechanism for rotational motion with two driving PZT is proposed. The actuator which is made by proposed mechanism is able to coarse motion and fine motion And we applied dual mode control to system. The behavior and design parameters of the proposed mechanism are analyzed for improving performance.