진공용 초소형 제품조작을 위한 매니퓰레이터 제작

Abstract

Recently PZT is used in ultra precision mechanism field. PZT itself has a small driving range although it has a high resolution. Many methods, such as inchworm, impact driving, inertial sliding method, etc., have been applied for moving range expansion. In this study, a new actuating mechanism for rotational motion with two driving PZT is proposed. The Fixed-Fixed beam support is applied for compensation of the difference in driving force between expansion and contraction of PZT. The behavior and design parameters of the proposed mechanism are analyzed for improving performance.