체크밸브가 달린 열공압 방식의 PDMS-유리 마이크로 펌프에 관한 연구
- Title
- 체크밸브가 달린 열공압 방식의 PDMS-유리 마이크로 펌프에 관한 연구
- Other Titles
- A Study About PDMS-Glass Based Thermopneumatic Micropump Integrated with Check Valve
- Author
- 안유민
- Keywords
- Thermopneumatic Micropump(열공압 마이크로펌프); PDMS Micro Check Valve(PDMS 마이크로 체크밸브); Detachable PDMS-Glass Micropump(분리식 PDMS-유리 마이크로펌프)
- Issue Date
- 2008-09
- Publisher
- 대한기계학회
- Citation
- 대한기계학회논문집 A, v. 32, No. 9, Page. 720-727
- Abstract
- Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 ㎜ and the width and depth of the channel are 200 and 180㎛, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.
- URI
- http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01037264https://repository.hanyang.ac.kr/handle/20.500.11754/104884
- ISSN
- 1226-4873
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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