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구동오차 보상에 의한 정밀 표면형상 측정 기술

Title
구동오차 보상에 의한 정밀 표면형상 측정 기술
Other Titles
High Precision Surface Form Profile Measurement Technique by Motion Error Compensation
Author
조남규
Keywords
surface form profile measurement; error separation; multi-probe method; motion error compensation
Issue Date
2016-05
Publisher
한국정밀공학회
Citation
한국정밀공학회 2016년도 춘계학술대회 논문집, Page. 106-107
URI
http://www.dbpia.co.kr/Journal/ArticleDetail/NODE06692021https://repository.hanyang.ac.kr/handle/20.500.11754/102393
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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