| 2006-12 | Effect of slurry pH on poly silicon CMP | 박진구 |
| 2008-04 | Effect of sodium periodate in alumina-based slurry on Ru CMP for metal-insulator-metal capacitor | 박진구 |
| 2008-04 | Effect of sodium periodate in alumina-based slurry on RuCMP for metal-insulator-metal capacitor | 박진구 |
| 2021-02 | Effect of Surfactant in Gas Dissolved Cleaning Solutions on Acoustic Bubble Dynamics | 박진구 |
| 2021-02 | The Effect of Thermal Aging on Nano-Particle Removal | 박진구 |
| 2012-08 | Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask | 박진구 |
| 2012-09 | Effective Carbon Contaminant Cleaning Condition Using Ozone Dissolved Water and Megasonic for Ru-Capped Extreme Ultraviolet Lithography Mask | 박진구 |
| 2021-09 | Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum | 박진구 |
| 2012-04 | Effects of Interfacial Strength and Dimension of Structures on Physical Cleaning Window | 박진구 |
| 2004-06 | The Effects of Mechanical Properties of Polishing Pads on Oxide CMP(Chemical Mechanical Planarization) | 박진구 |
| 2005-10 | The Effects of pH Adjustors in Post Cu CMP Cleaning Solutions on Particle Adhesion and Removal | 박진구 |
| 2014-11 | Effects of pump-induced particle agglomeration during chemical mechanical planarization (CMP) | 박진구 |
| 2009-02 | Effects of size, humidity, and aging on particle removal from Si wafers | 박진구 |
| 2011-11 | Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications | 박진구 |
| 2011-10 | Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process | 박진구 |
| 2012-08 | Electrochemical Impedance Spectroscopy (EIS) Analysis of BTA Removal by TMAH during Post Cu CMP Cleaning Process | 박진구 |
| 2011-06 | Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip | 박진구 |
| 2011-06 | Enhanced Fluorescence by Controlled Surface Roughness of Plastic Biochip | 박진구 |
| 2011-04 | Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning | 박진구 |
| 2011-04 | Enhancement of airborne shock wave by laser-induced breakdown of liquid column in laser shock cleaning | 박진구 |
