Investigation of plasma diagnostics using a dual frequency harmonic technique
- Title
- Investigation of plasma diagnostics using a dual frequency harmonic technique
- Author
- 정진욱
- Keywords
- 71 CLASSICAL AND QUANTUM MECHANICS; GENERAL PHYSICS; CURRENTS; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; ELECTROSTATIC PROBES; HARMONICS; NOISE; PLASMA DIAGNOSTICS; RANDOMNESS; SENSITIVITY; SIMULATION
- Issue Date
- 2014-09
- Publisher
- American Institute of Physics
- Citation
- Journal of Applied Physics, 2014, 116(9), P.093302-1~093302-5
- Abstract
- Plasma diagnostic methods using harmonic currents analysis of electrostatic probes were experimentally investigated to understand the differences in their measurement of the plasma parameters. When dual frequency voltage (ω1,ω2) was applied to a probe, various harmonic currents (ω1,?2ω1,ω2,?2ω2,ω2±ω1,ω2±2ω1) were generated due to the non-linearity of the probe sheath. The electron temperature can be obtained from the ratio of the two harmonics of the probe currents. According to the combinations of the two harmonics, the sensitivities in the measurement of the electron temperature differed, and this results in a difference of the electron temperature. From experiments and simulation, it is shown that this difference is caused by the systematic and random noise.
- URI
- https://aip.scitation.org/doi/abs/10.1063/1.4894517http://hdl.handle.net/20.500.11754/57312
- ISSN
- 0021-8979
- DOI
- 10.1063/1.4894517
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
- Files in This Item:
There are no files associated with this item.
- Export
- RIS (EndNote)
- XLS (Excel)
- XML