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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-9 of 9 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2005-05
Simulation of thermal resist flow process
오혜근
2008-11
Solving the Navier-Stokes Equation for Thermal Reflow
오혜근
2004-11
Bulk effects of the thermal flow resists
오혜근
2004-11
A study of process parameter control for nanopattern
오혜근
2009-08
Impact of the Parameters for a Chemically-amplified Resist on the Line-edge-roughness by Using a Molecular-scale Lithography Simulation
정영대
2010-03
Mechanism of Embedded Micro/Nano Channel Formation for a Negative-tone Photoresist by Moving Mask Lithography
정영대
2010-12
Simulation Study of Sub-10 nm Pattern Formation Using Diblock Polymer Directed Self-assembly
정영대
2010-05
A study of virtual lithography process for polymer directed self-assembly
정영대
2009-04
Impact of Polarization Inside a Resist for ArF Immersion Lithography
정영대
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-Author
5
정영대
4
오혜근
-Subject
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Chemically amplified resist
2
Chemically-amplified resist
2
Self-assembly
2
Self-assembly process
1
Block copolymer
1
Embedded fluidic channels
1
Finite element method
1
Finite-difference time domain
1
Immersion lithography
1
Inverse lithography
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2010
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2004
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