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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 1-7 of 7 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2005-05
The evaluation of aberration effects according to pattern shape and duty ratio
오혜근
2005-10
Mask Error Enhancement Factor Variation with Pattern Density
오혜근
2003-02
A practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer
오혜근
2003-02
Prediction of the Critical Dimensions by Using a Threshold Energy Resist Model
오혜근
2003-11
Simulation Parameter Extraction Using Distribution Processing and Fast SEM Profile Digitization
오혜근
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7
오혜근
-Subject
4
Lithography
1
248 nm
1
32 nm node
1
Aerial image
1
Benchmark
1
CAR
1
CCSE
1
Diffusion length
1
Distributed processing
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Duty ratio
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