Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 10 (Search time: 0.001 seconds).
Item hits:
Issue Date
Title
Author(s)
2007-09
Critical dimension control for 32 nm random contact hole array with resist reflow process
오혜근
2008-11
22 nm 1:1 line and space patterning by using double patterning and resist reflow process
오혜근
2008-02
32 nm 1:1 line and space patterning by resist reflow process
오혜근
2008-02
Resist reflow process for arbitrary 32 nm node pattern
오혜근
2007-02
Photoresist adhesion effect of resist reflow process
오혜근
2008-01
32 nm 1:1 Line and Space Patterning by Resist Reflow Process
오혜근
2008-03
32 nm 1:1 line and space patterning by resist reflow process
정희준
2009-04
Reduction of line width and edge roughness by resist reflow process for extreme ultra-violet lithography
홍주유
2007-11
Critical dimension control for 32 nm node random contact hole array with resist reflow process
홍주유
2007-11
Anisotropic resist reflow process simulation for 32 nm node elongated contact holes
홍주유
previous
1
next
Discover
-Author
6
오혜근
3
홍주유
1
정희준
-Subject
4
Navier-Stokes equation
3
32 nm line and space half-pitch
3
Contact hole
3
Optical proximity correction
2
Bulk effect
2
Double patterning
2
Viscosity
1
22 nm node
1
22nm half pitch
1
32 nm node
next >
-Date issued
1
2009
5
2008
4
2007
BROWSE
Communities & Collections
Titles
Authors