Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-9 of 9 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2007-09
Which Mask is Preferred for Sub-60 nm Node Imaging?
오혜근
2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2006-11
Investigation of optimum biasing and undercut for single trench alternating phase shift mask in 193 nm lithography
오혜근
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process: I. Numerical Approach
오혜근
2008-11
A mask generation approach to double patterning technology with inverse lithography
오혜근
2008-11
Heat conduction to photoresist on top of wafer during post exposure bake process:II. Application
오혜근
2008-08
Ellipsometry for Pellicle-Covered Surface
오혜근
2007-04
Resist Reflow Modeling Including Surface Tension and Bulk Effect
오혜근
2002-06
Sensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical Dimension
오혜근
previous
1
next
Discover
-Subject
2
double patterning
2
lithography simulation
2
numerical approach
2
polarization
1
alternating phase shift mask
1
analytical method
1
array
1
bias
1
bulk effect
1
chemically amplified resist
next >
-Date issued
4
2008
3
2007
1
2006
1
2002
BROWSE
Communities & Collections
Titles
Authors