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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
831
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-Author
2
이승규
1
권영일
1
허지혁
-Subject
27
Lithography
13
Lithography simulation
12
lithography
11
ellipsometry
10
Resist reflow process
9
EUV lithography
9
Navier-Stokes equation
8
atomic processes
8
EUVL
8
plasmas
-Date issued
66
2020 - 2024
277
2010 - 2019
480
2000 - 2009
7
1999 - 1999
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831
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