Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
Articles
Theses (Master)
Theses (Ph.D.)
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 19 (Search time: 0.004 seconds).
Item hits:
Issue Date
Title
Author(s)
2002-10
Bulk Image Formation of Scalar Modeling in a Photoresist
오혜근
2002-12
Process Study of a 200 nm Laser Pattern Generator
오혜근
2002-12
Resist distribution effect of spin coating
오혜근
2002-06
Sensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical DimensionSensitivity of Simulation Parameter for Critical Dimension
오혜근
2002-06
Development of multichannel ellipsometry with synchronously rotating polarizer and analyzer
오혜근
2002-03
Resist Distribution Effect of Spin Coating
오혜근
2002-03
Resist Develop Prediction by Monte Carlo Simulation
오혜근
2002-03
CD Prediction by Threshold Energy Resist Model
오혜근
2002-01
기판 단차에 따른 감광제의 분포와 선폭 변화
오혜근
2002-01
화학 증폭형 감광제의 전산모사를 위한 PEB 변수 추출
오혜근
previous
1
2
next
Discover
-Subject
3
Lithography
1
200 nm laser pattern
1
Acid distribution
1
Aerial image
1
Apodization
1
Bulk image
1
calibration
1
CAR
1
Chemically amplified resist
1
critical dimension
next >
BROWSE
Communities & Collections
Titles
Authors