Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)APPLIED PHYSICS(응용물리학과)Articles
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Resist Develop Prediction by Monte Carlo Simulation
- Title
- Resist Develop Prediction by Monte Carlo Simulation
- Author
- 오혜근
- Issue Date
- 2002-03
- Publisher
- SPIE-INT SOCIETY OPTICAL ENGINEERING
- Citation
- Proceedings of the SPIE, v. 4690, page. 971-977
- Abstract
- Various resist develop models have been suggested to express the phenomena from the pioneering work of Dill&apos
- URI
- https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4690/0000/Resist-develop-prediction-by-Monte-Carlo-simulation/10.1117/12.474172.shorthttps://repository.hanyang.ac.kr/handle/20.500.11754/156755
- ISSN
- 0277-786X
- Appears in Collections:
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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