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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
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Results 1-10 of 18 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Reflow Modeling for Elongated Contact Hole Shape
김대경
2006-02
Reflow modeling for elongated contact hole shape
홍주유
2004-05
Simple 157-nm interference illumination system for pattern formation
오혜근
2004-05
Exposure simulation of electron beam microcolumn lithography
오혜근
2004-04
Simulation benchmarking for the whole resist process
오혜근
2005-05
The evaluation of aberration effects according to pattern shape and duty ratio
오혜근
2005-05
Simulation of thermal resist flow process
오혜근
2008-02
Ellipsometric inspection of the inner surface of pellicle-covered masks
안일신
2008-11
Influence of Various Defects on Extreme Ultra-Violet Mask
오혜근
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오혜근
2
안일신
2
정영대
1
김대경
1
홍주유
-Subject
6
Lithography simulation
3
Chemically amplified resist
3
Contact hole
3
Navier-stokes equation
3
Resist reflow
3
Viscosity
2
CCSE
2
CHEMICALLY AMPLIFIED RESIST
2
chemically amplified resist
2
Chemically-amplified resist
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