Hanyang University repository
menu
검색
Library
Hanyang
Browse
Communities & Collections
Titles
Authors
My Repository
My Account
Receive email updates
Edit Profile
Repository at Hanyang University
Search
All of Repository
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED CHEMISTRY(응용화학과)
APPLIED MATHEMATICS(응용수학과)
APPLIED PHYSICS(응용물리학과)
CHEMICAL AND MOLECULAR ENGINEERING(화학분자공학과)
MARINE SCIENCE AND CONVERGENCE ENGINEERING(해양융합공학과)
MARINE SCIENCES AND CONVERGENT TECHNOLOGY(해양융합과학과)
MOLECULAR AND LIFE SCIENCE(분자생명과학과)
PHOTONICS AND NANOELECTRONICS(나노광전자학과)
ETC
Start a new search
Current filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 61-70 of 77 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2003-06
Resist Pattern Collapse with Top Rounding Resist Profile
안일신
2001-08
Alignment and Calibration of the MgF2 Biplate Compensator for Applications in Rotating Compensator Multichannel Ellipsometry
안일신
2003-02
A practical extracting method of PEB parameters by using rotating compensator spectroscopic ellipsometer,
안일신
2003-02
Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer
안일신
2003-02
A Practical Method of Extracting the Photoresist Exposure Parameters by Using a Dose-to-Clear Swing Curve
안일신
2003-02
Lithography Process Optimization Simulator for an Illumination System
안일신
2003-02
Resist Pattern Collapse Modeling for Smaller Features
안일신
2004-05
Multichannel Mueller matrix ellipsometer based on the dual rotating compensator principle
안일신
2004-05
Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer
안일신
2004-06
The Extraction of Develop Parameters by Using Cross-Sectional Critical Shape Error Method
안일신
previous
1
...
4
5
6
7
8
next
Discover
-Subject
10
ellipsometry
6
Ellipsometry
3
calibration
3
Lithography
3
lithography
3
Navier-Stokes equation
2
32 nm line and space half-pitch
2
ALIGNMENT
2
bias
2
BIPLATE COMPENSATOR
next >
-Date issued
12
2008
3
2007
13
2006
7
2005
9
2004
19
2003
2
2002
9
2001
3
2000
BROWSE
Communities & Collections
Titles
Authors