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COLLEGE OF ENGINEERING SCIENCES[E](공학대학)
MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과)
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Results 1-10 of 12 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2004-02
A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process
박진구
2005-06
Fabrication of metal line on plastic substrate by hot embossing and CMP process
박진구
2004-11
Slurry에 첨가되는 pH 적정제가 Cu CMP에 미치는 영향 분석
박진구
2001-08
Physical and chemical characterization of reused oxide Chemical Mechanical Planarization slurry
박진구
2004-07
CMP 공정중 전기화학적 방법과 마찰력을 이용하여 Cu Wafer와 Disc의 특성 비교
박진구
2001-03
Physical and Chemical Characterization of Reused Oxide Chemical Mechanical Planarization Slurry
박진구
2002-11
Point of Use Regeneration of Oxide Chemical Mechanical Planarization Slurry by Filterations
박진구
2002-11
Point of use regeneration of oxide chemical mechanical planarization slurry by filtrations
박진구
2000-03
Effect of chemicals and slurry particles on chemical mechanical polishing of polyimide
박진구
2005-11
Cu Oxide와 Silicon Tip 사이의 나노트라이볼러지 작용
박진구
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박진구
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oxide slurry
4
TEOS removal rate
2
conductivity
2
defect density
2
microscratch
2
pH of slurry
2
regenerated slurry
2
Removal rate
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RO filtration
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solid content change
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2008
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2005
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