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COLLEGE OF ENGINEERING[S](공과대학)
ELECTRONIC ENGINEERING(융합전자공학부)
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2013-10
Environmentally clean slurry using nano-TiO2-abrasive mixed with oxidizer H2O2 for ruthenium-film chemical mechanical planarization
박재근
2013-10
Effect of iron(III) nitrate concentration on tungsten chemical-mechanical-planarization performance
박재근
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REMOVAL
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THIN-FILMS
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Catalyst
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CERIC AMMONIUM-NITRATE
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Chemical mechanical planarization
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Chemical mechanical polishing
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CMP
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CMP PROCESS
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Fe(NO3)(3)
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2013
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