49 0

Effect of iron(III) nitrate concentration on tungsten chemical-mechanical-planarization performance

Title
Effect of iron(III) nitrate concentration on tungsten chemical-mechanical-planarization performance
Author
박재근
Keywords
Tungsten; Chemical mechanical planarization; Oxidizer; Fe(NO3)(3); Catalyst; MIXED OXIDIZERS; CMP PROCESS; THIN-FILMS; BEHAVIOR; SLURRIES; REMOVAL
Issue Date
2013-10
Publisher
Elsevier Science B.V., Amsterdam.
Citation
Applied Surface Science, 2013, 282, P.512-517
Abstract
Investigating the catalytic effect of Fe(NO3)(3) on the performance of tungsten (W) chemical mechanical planarization in H2O2-based acidic slurries, we found that the trend of the polishing rate with increasing Fe(NO3)(3) concentration was divided into two regions. The polishing rate in region I (<0.10 wt%) increased rapidly because of the increase of the WO3 layer formed by the reaction of Fe(NO3)(3) and H2O2. The polishing rate in region II (>0.10 wt%), on the other hand, increased only slightly with increasing Fe(NO3)(3) concentration. We suggest the excess ferric ions in the slurry were rapidly supplied to the W surface. Consequently, the addition of Fe(NO3)(3) resulted in the rapid formation of the WO3 layer because of the decomposition of H2O2 into O-2 by Fe3+ ion, and polishing rate increased with the Fe(NO3)(3) concentration. This polishing trend was explained through the opposite trend of static etch rate, the confirmation of the surface morphology, the trend of the WO3 content on the W surface, and the trend of the corrosion potential and the corrosion current density. (C) 2013 Elsevier B.V. All rights reserved.
URI
https://ac.els-cdn.com/S0169433213011021/1-s2.0-S0169433213011021-main.pdf?_tid=79f3e447-a2cd-4676-9844-54770a970ca8&acdnat=1520507572_d09e6f841262623bef10dc237bc7b570http://hdl.handle.net/20.500.11754/44923
ISSN
0169-4332
DOI
10.1016/j.apsusc.2013.06.003
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE