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COLLEGE OF ENGINEERING[S](공과대학)
MATERIALS SCIENCE AND ENGINEERING(신소재공학부)
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Results 1-6 of 6 (Search time: 0.002 seconds).
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2012-02
A study of thin film encapsulation on polymer substrate using low temperature hybrid ZnO/Al2O3 layers atomic layer deposition
박진성
2012-01
Impact of ozone concentration on atomic layer deposited HfO2 on GaAs
안진호
2012-12
Effects of Ar plasma treatment for deposition of ruthenium film by remote plasma atomic layer deposition
전형탁
2012-12
Effects of a SiO2 buffer layer on the flatband voltage shift of La2O3 gate dielectric grown by using remote plasma atomic layer deposition
전형탁
2012-12
Gadolinium nitride films deposited using a PEALD based process
전형탁
2012-10
Plasma-enhanced atomic layer deposition of Cu-Mn films with formation of a MnSixOy barrier layer
박종완
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Al2O3
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Auger electron spectroscopy
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Cu interconnect
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Cu seed layer
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Gadolinium compounds
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Gas diffusion barrier
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