FREQUENCY CAPACITIVE DISCHARGES; STANDING-WAVE; DEPOSITION; ELECTRODE
Issue Date
2013-08
Publisher
IOP PUBLISHING
Citation
PLASMA SOURCES SCIENCE & TECHNOLOGY, OCT 2013, 22(5), P.055005, 8P.
Abstract
In this work, we attempt to overcome the problem of non-uniformity of large-area capacitively coupled plasmas. We select a multi-electrode concept and construct a system with two concentric electrodes. In the two-circuit model, both electrodes have the same area. The plasma of this system is measured by a two-dimensional probe array. We measure the plasma in the large-area chamber that has the multi-electrode. We reduce the non-uniformity to almost 3% and investigate the conditions of a uniform plasma.