Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)APPLIED PHYSICS(응용물리학과)Articles
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dc.contributor.author오혜근-
dc.date.accessioned2021-01-08T04:37:11Z-
dc.date.available2021-01-08T04:37:11Z-
dc.date.issued2002-03-
dc.identifier.citationProceedings of the SPIE, v. 4690, page. 971-977en_US
dc.identifier.issn0277-786X-
dc.identifier.urihttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4690/0000/Resist-develop-prediction-by-Monte-Carlo-simulation/10.1117/12.474172.short-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/156755-
dc.description.abstractVarious resist develop models have been suggested to express the phenomena from the pioneering work of Dill&aposen_US
dc.language.isoen_USen_US
dc.publisherSPIE-INT SOCIETY OPTICAL ENGINEERINGen_US
dc.titleResist Develop Prediction by Monte Carlo Simulationen_US
dc.typeArticleen_US
dc.identifier.doi10.1117/12.474172-
dc.relation.journalOPTICAL ENGINEERING-
dc.contributor.googleauthorSohn, Dong-Soo-
dc.contributor.googleauthorJeon, Kyoung-Ah-
dc.contributor.googleauthorSohn, Young-Soo-
dc.contributor.googleauthorOh, Hye-Keun-
dc.relation.code2009207295-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E]-
dc.sector.departmentDEPARTMENT OF APPLIED PHYSICS-
dc.identifier.pidhyekeun-
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