Controller design; Dual servo; Flexure hinge joint; Position control; PZT Sensitivity; VCM
Issue Date
2004-09
Publisher
IFAC Secretariat
Citation
IFAC Proceedings Volumes 2004, v. 37, No. 14, Page. 283-288
Abstract
This paper presents a high precision positioning mechanism design with dual actuator. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of a flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.