Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 한창수 | - |
dc.date.accessioned | 2020-07-20T06:57:03Z | - |
dc.date.available | 2020-07-20T06:57:03Z | - |
dc.date.issued | 2004-09 | - |
dc.identifier.citation | IFAC Proceedings Volumes 2004, v. 37, No. 14, Page. 283-288 | en_US |
dc.identifier.issn | 1474-6670 | - |
dc.identifier.uri | https://information.hanyang.ac.kr/#/eds/detail?an=edselc.2-52.0-85064527637&dbId=edselc | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/151784 | - |
dc.description.abstract | This paper presents a high precision positioning mechanism design with dual actuator. In the fields of micro positioning, micromanipulation and micro test instrument, the required motion precision is continuously increasing. Dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of a flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method. | en_US |
dc.description.sponsorship | This work has been sponsored by MOCIE(Ministry of Commerce, Industry and Energy) of Korea as a part of the project of "Development of FIB (Focused lonBeam) Nano-Machining System". | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IFAC Secretariat | en_US |
dc.subject | Controller design | en_US |
dc.subject | Dual servo | en_US |
dc.subject | Flexure hinge joint | en_US |
dc.subject | Position control | en_US |
dc.subject | PZT Sensitivity | en_US |
dc.subject | VCM | en_US |
dc.title | Dual servo mechanism for high precision positioning with VCM and PZT actuator | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1016/S1474-6670(17)31117-5 | - |
dc.contributor.googleauthor | Choi, H. | - |
dc.contributor.googleauthor | Hong, W. | - |
dc.contributor.googleauthor | Kang, E | - |
dc.contributor.googleauthor | Choi, H. | - |
dc.contributor.googleauthor | Han, C. | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF ROBOT ENGINEERING | - |
dc.identifier.pid | cshan | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.