Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
- Title
- Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
- Author
- 오제훈
- Keywords
- Pressure sensor; Porous structures; Microwave treatment; Polydimethylsiloxane (PDMS); Surface microstructure; Capacitance
- Issue Date
- 2019-07
- Publisher
- ELSEVIER SCIENCE BV
- Citation
- MICROELECTRONIC ENGINEERING, v. 215, Article no. 111002
- Abstract
- This work aims to present a flexible, highly sensitive, capacitive pressure sensor based on an elastomeric dielectric layer with uniformly distributed micro-pores. The porous dielectric layer was simply produced by microwave treatment of polydimethylsiloxane (PDMS) mixed with a sacrificial solvent within a few minutes. The pressure sensor using a porous PDMS dielectric layer fabricated with 40 wt% sacrificial solvent had a sensitivity of 0.813 kPa(-1), which is 11 times higher than that of the sensor using a non-porous dielectric layer. To further improve the sensitivity, low-cost commercial glass was used as a mold to form microstructures on the surface of the porous dielectric layer. Due to the enhanced deformability, high sensitivity of 1.43 kPa(-1) and a fast response time of 70 ms was achieved. The performances of a sensor array as well as finger sensors were also demonstrated by placing light-weight objects on the array and holding a plastic cup. It would be expected that the proposed sensors could be utilized in the application of artificial skins or soft robotics.
- URI
- https://www.sciencedirect.com/science/article/pii/S0167931719301534https://repository.hanyang.ac.kr/handle/20.500.11754/121906
- ISSN
- 0167-9317; 1873-5568
- DOI
- 10.1016/j.mee.2019.111002
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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