40 0

Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment

Title
Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
Author
오제훈
Keywords
Pressure sensor; Porous structures; Microwave treatment; Polydimethylsiloxane (PDMS); Surface microstructure; Capacitance
Issue Date
2019-07
Publisher
ELSEVIER SCIENCE BV
Citation
MICROELECTRONIC ENGINEERING, v. 215, Article no. 111002
Abstract
This work aims to present a flexible, highly sensitive, capacitive pressure sensor based on an elastomeric dielectric layer with uniformly distributed micro-pores. The porous dielectric layer was simply produced by microwave treatment of polydimethylsiloxane (PDMS) mixed with a sacrificial solvent within a few minutes. The pressure sensor using a porous PDMS dielectric layer fabricated with 40 wt% sacrificial solvent had a sensitivity of 0.813 kPa(-1), which is 11 times higher than that of the sensor using a non-porous dielectric layer. To further improve the sensitivity, low-cost commercial glass was used as a mold to form microstructures on the surface of the porous dielectric layer. Due to the enhanced deformability, high sensitivity of 1.43 kPa(-1) and a fast response time of 70 ms was achieved. The performances of a sensor array as well as finger sensors were also demonstrated by placing light-weight objects on the array and holding a plastic cup. It would be expected that the proposed sensors could be utilized in the application of artificial skins or soft robotics.
URI
https://www.sciencedirect.com/science/article/pii/S0167931719301534https://repository.hanyang.ac.kr/handle/20.500.11754/121906
ISSN
0167-9317; 1873-5568
DOI
10.1016/j.mee.2019.111002
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE