Repository at Hanyang UniversityCOLLEGE OF ENGINEERING[S](공과대학)MECHANICAL ENGINEERING(기계공학부)Articles
249
0
IGZO 반도체 및 구리 전극의 deep-UV/IPL 광어닐링 공정을 통한 TFT 특성 연구
- Title
- IGZO 반도체 및 구리 전극의 deep-UV/IPL 광어닐링 공정을 통한 TFT 특성 연구
- Other Titles
- Study on all intense pulsed light (IPL) annealed thin film transistor (TFT) using IGZO semiconductor and Cu source drain via UV-assisted flash light irradiation
- Author
- 김학성
- Issue Date
- 2019-04
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 재료 및 파괴부문 2019년도 춘계학술대회 논문집, Page. 43-44
- URI
- http://www.dbpia.co.kr/view/ar_view.asp?arid=4803427https://repository.hanyang.ac.kr/handle/20.500.11754/110804
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MECHANICAL ENGINEERING(기계공학부) > Articles
- Files in This Item:
There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
