| 2011-10 | Nano Gas Cluster Dry Cleaning for Damage Free Particle Removal | 박진구 |
| 2010-12 | Nano gas cluster dry cleaning for damage free particle removal | 박진구 |
| 2020-03 | Nanocatalyst-induced hydroxyl radical (·OH) slurry for tungsten CMP for next-generation semiconductor processing | 박진구 |
| 2020-03 | Nanocatalyst-induced hydroxyl radical ((OH)-O-center dot) slurry for tungsten CMP for next-generation semiconductor processing | 박진구 |
| 2007-06 | Nanoparticle scanning and detection on flat and structured surfaces using fluorescence microscopy | 박진구 |
| 2012-07 | Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning | 박진구 |
| 2012-07 | Nanoscale Particle Removal Using Wet Laser Shockwave Cleaning | 박진구 |
| 2005-10 | Nanoscale Particles Removal on an Extreme Ultra-Violet Lithography(EUVL) Mask Layer by Lasershock Cleaning | 박진구 |
| 2001-07 | Nanotribological Characterization of Fluorocarbon Thin Film by Plasma Enhanced CVD | 박진구 |
| 2002-03 | Next Generation Scratch and Corrosion Free Conditioner for Chemical Mechanical Planarization | 박진구 |
| 2013-01 | Non Destructive Nanoparticle Removal from Submicron Structures Using Megasonic Cleaning | 박진구 |
| 2009-11 | A novel approach for scratch detection and study on dependency of scratches during oxide CMP | 박진구 |
| 2017-10 | Novel method for nano-surface analysis of Cu CMP chemicals by AFM and microfluidic chip system | 박진구 |
| 2015-01 | Novel one-step route to induce long-term lotus leaf-like hydrophobicity in polyester fabric | 박진구 |
| 2015-03 | Novel one-step route to induce long-term lotus leaf-like hydrophobicity in polyester fabric | 박진구 |
| 2010-05 | Numerical and Experimental Evaluation of Picoliter Inkjet Head for Micropatterning of Printed Electronics | 박진구 |
| 2013-04 | On the mechanism of material removal by fixed abrasive lapping of various glass substrates | 박진구 |
| 2013-04 | On the mechanism of material removal by fixed abrasive lapping of various glass substrates | 박진구 |
| 2013-04 | Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers | 박진구 |
| 2013-04 | Optimal Pressure and Temperature Conditions for Deposition of FOTS Thin Films Suitable for Anti-Stiction Layers | 박진구 |
