Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이선영 | - |
dc.date.accessioned | 2019-02-08T05:12:08Z | - |
dc.date.available | 2019-02-08T05:12:08Z | - |
dc.date.issued | 2018-11 | - |
dc.identifier.citation | SENSORS AND ACTUATORS B-CHEMICAL, v. 274, Page. 331-337 | en_US |
dc.identifier.issn | 0925-4005 | - |
dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0925400518313753 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/98770 | - |
dc.description.abstract | In this study, a cupric oxide (CuO) flexible humidity sensor was fabricated using a kinetic spray process. After deposition of a 200-nm-thick Cu film, the as-deposited Cu layer was annealed at 250 degrees C, a relatively low temperature, in air conditions to create a CuO layer. N-type CuO (carrier concentration: -23.08x10(14) cm(-3)) formed after reacting with oxygen during the annealing process in air via oxygen vacancy formation. The semi-transparent properties of the CuO film were characterized by measuring visible light transmittance. Stable sensing signals of 0.16-0.18 were obtained after the 1000th bending test. Scanning electron microscopy was used to examine the surface morphology of the CuO layer after the bending test; despite the presence of a few microcracks, delamination was not observed. Thus, a CuO-based humidity sensor was successfully fabricated through simple particle spray deposition and low-temperature annealing processes; the sensor maintained its performance under repeated bending stress (up to 1000 cycles). | en_US |
dc.description.sponsorship | This research was supported by the Human Resources Development program (No. 20174030201830) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korea government Ministry of Trade, Industry and Energy; and by a National Research Foundation of Korea (NRF) grant funded by the Korean government (No. NPF- 2016R1D1A1A02936936), and Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science, ICT & Future Planning (No. 2015R1A5A1037548). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELSEVIER SCIENCE SA | en_US |
dc.subject | Cupric oxide | en_US |
dc.subject | Flexible sensor | en_US |
dc.subject | Humidity | en_US |
dc.subject | Kinetic spray | en_US |
dc.title | Fabrication of a semi-transparent flexible humidity sensor using kinetically sprayed cupric oxide film | en_US |
dc.type | Article | en_US |
dc.relation.volume | 274 | - |
dc.identifier.doi | 10.1016/j.snb.2018.07.127 | - |
dc.relation.page | 331-337 | - |
dc.relation.journal | SENSORS AND ACTUATORS B-CHEMICAL | - |
dc.contributor.googleauthor | Kim, Hyungsub | - |
dc.contributor.googleauthor | Park, Soobin | - |
dc.contributor.googleauthor | Park, Yunchan | - |
dc.contributor.googleauthor | Choi, Dahyun | - |
dc.contributor.googleauthor | Yoo, Bongyoung | - |
dc.contributor.googleauthor | Lee, Caroline Sunyong | - |
dc.relation.code | 2018001066 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | sunyonglee | - |
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