Hydrogen gettering of titanium-palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing
- Title
- Hydrogen gettering of titanium-palladium/palladium nanocomposite films synthesized by cosputtering and vacuum-annealing
- Author
- 좌용호
- Keywords
- Hydrogen; Getter; Titanium-palladium; Composite film; Multilayer
- Issue Date
- 2018-10
- Publisher
- PERGAMON-ELSEVIER SCIENCE LTD
- Citation
- INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, v. 43, No. 43, Page. 19990-19997
- Abstract
- Nano-engineered composite film, prepared by the combination of titanium (Ti) nanoparticles with surrounding layers of palladium (Pd), has been suggested as a high performance hydrogen (H-2) getter. Uniform Ti Pd film covered by a 35-nm-thick Pd layer was deposited on a silicon wafer via cosputtering and post-vacuum-annealing. As the annealing temperature increased from 200 to 400 degrees C, amorphous alloy and nano-aggregates were observed, and efficient structural modulation occurred at 400 degrees C, where dewetting of Pd cover layer from the getter surface was observed. This led to the enhancement of the chemisorption capacity of the 400 degrees C-annealed sample, two-times higher than that of the 300 degrees C-annealed sample. Abrupt change in residual gases, which typically come from a bonding process, can be mitigated by minimizing the gas transfer distance through the dewetting of the cover layer; since Ti nanoparticles surrounded by Pd exist independently of each other in the gettering layer, external H-2 gas molecules can be continuously adsorbed onto still-unreacted Ti particles by passing through the dewetted channels in the Pd cover layer. This concept demonstrates a pathway towards a useful synthetic approach for high-performance thin-film getters with high adsorption capacity, fast gettering rate and good device compatibility. (C) 2018 Hydrogen Energy Publications LLC. Published by Elsevier Ltd. All rights reserved.
- URI
- https://www.sciencedirect.com/science/article/pii/S0360319918328593https://repository.hanyang.ac.kr/handle/20.500.11754/81414
- ISSN
- 0360-3199
- DOI
- 10.1016/j.ijhydene.2018.09.017
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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