Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-09-04T10:46:41Z | - |
dc.date.available | 2018-09-04T10:46:41Z | - |
dc.date.issued | 2012-05 | - |
dc.identifier.citation | Journal of Applied Physics, 2012, 111(9) | en_US |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.uri | https://aip.scitation.org/doi/abs/10.1063/1.4705362?journalCode=jap | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/74881 | - |
dc.description.abstract | Electron energy distribution functions (EEDFs) of low pressure O2 plasma were measured by adding small amount of coil power in a capacitive discharge. When the plasma was generated by bias power only, the measured EEDF showed a bi-Maxwellian distribution. However, when a very small coil power (a few Watts) was added, the EEDF evolved abruptly into a Maxwellian distribution, while the electron density was decreased. In an Ar/O2 mixture discharge, this EEDF evolution to the Maxwellian was also observed at a relatively higher coil power. This abrupt change in EEDFs with a very small coil power appears to be attributed to a combined effect of collisionless heating by capacitive and induced electric fields. | en_US |
dc.description.sponsorship | This work was supported by the SRC (2011-0000845) and the Basic Science Research Program (2010-0003122) of Research Foundation of Korea (NRF) grant funded by the Korea government (MEST). | en_US |
dc.language.iso | en | en_US |
dc.publisher | American Institute of Physics | en_US |
dc.title | Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmas | en_US |
dc.type | Article | en_US |
dc.relation.no | 9 | - |
dc.relation.volume | 111 | - |
dc.identifier.doi | 10.1063/1.4705362 | - |
dc.relation.page | 1-1 | - |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.contributor.googleauthor | Lee, Min-Hyong | - |
dc.relation.code | 2012204664 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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