Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2018-07-10T04:42:21Z | - |
dc.date.available | 2018-07-10T04:42:21Z | - |
dc.date.issued | 2016-06 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v. 23, NO 6, Page. 1-5 | en_US |
dc.identifier.issn | 1070-664X | - |
dc.identifier.issn | 1089-7674 | - |
dc.identifier.uri | https://aip.scitation.org/doi/10.1063/1.4952634 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/72440 | - |
dc.description.abstract | The electron bounce resonance was experimentally investigated in a low pressure planar inductively coupled plasma. The electron energy probability functions (EEPFs) were measured at different chamber heights and the energy diffusion coefficients were calculated by the kinetic model. It is found that the EEPFs begin to flatten at the first electron bounce resonance condition, and the plateau shifts to a higher electron energy as the chamber height increases. The plateau which indicates strong electron heating corresponds not only to the electron bounce resonance condition but also to the peaks of the first component of the energy diffusion coefficients. As a result, the plateau formation in the EEPFs is mainly due to the electron bounce resonance in a finite inductive discharge. Published by AIP Publishing. | en_US |
dc.description.sponsorship | We are grateful to Dr. S. S. Kim of the National Fusion Research Institute, who provided the kinetic code to us. This research was supported by the Converging Research Center Program (NRF-2014M3C1A8053701), the National R&D Program (NRF-2014M1A7A1A03045185, the MOTIE and KSRC (10052861). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | DISCHARGE PLASMAS | en_US |
dc.subject | KINETICS | en_US |
dc.title | Experimental observation of electron bounce resonance through electron energy distribution measurement in a finite size inductively coupled plasma | en_US |
dc.type | Article | en_US |
dc.relation.no | 6 | - |
dc.relation.volume | 23 | - |
dc.identifier.doi | 10.1063/1.4952634 | - |
dc.relation.page | 1-5 | - |
dc.relation.journal | PHYSICS OF PLASMAS | - |
dc.contributor.googleauthor | Gu, Seuli | - |
dc.contributor.googleauthor | Kang, Hyun-Ju | - |
dc.contributor.googleauthor | Kwon, Deuk-Chul | - |
dc.contributor.googleauthor | Kim, Yu-Sin | - |
dc.contributor.googleauthor | Chang, Yoon-Min | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.relation.code | 2016001793 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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