Fabrication of highly-sensitive capacitive pressure sensors with electrospun polymer nanofibers

Abstract

Highly sensitive capacitive pressure sensors with poly(vinylidenefluoride-co-trifluoroethylene) (P(VDF-TrFE)) dielectric layers were prepared. The dielectric layers were directly produced by electrospinning P(VDF-TrFE) nanofibers for various spinning times. A longer spinning time enhanced the deformability of the electrospun P(VDF-TrFE) layers, resulting in higher sensitivity owing to larger changes in the deformation of the dielectric layer. One of the capacitive pressure sensors showed a high sensitivity of 2.81 kPa(-1) at a pressure <= 0.12 kPa, a good response time of 42 ms, and small hysteresis. The sensitivity of the sensor was five times higher than that of a typical capacitive pressure sensor. The fabricated pressure sensor could detect a tiny water droplet as light as 7mg. It is expected that the electrospun P(VDF-TrFE) nanofibers can be used as sensing materials for highly sensitive pressure sensors in wearable electronics applications. Published by AIP Publishing.