Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이선영 | - |
dc.date.accessioned | 2018-05-30T04:50:09Z | - |
dc.date.available | 2018-05-30T04:50:09Z | - |
dc.date.issued | 2017-02 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS, v. 56, No. 3, Article no. 035506 | en_US |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.issn | 1347-4065 | - |
dc.identifier.uri | http://iopscience.iop.org/article/10.7567/JJAP.56.035506/meta | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/71696 | - |
dc.description.abstract | Diamond-like carbon films containing titanium and hydrogen (Ti-doped DLC: H) were synthesized using a hybrid technique based on physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD). The film was deposited under a mixture of argon (Ar) and acetylene gas (C2H2). The amount of Ti in the Ti-doped DLC: H film was controlled by varying the DC power of the Ti sputtering target ranging from 0 to 240W. The composition, microstructure, mechanical and chemical properties of Ti-doped DLC: H films with varying Ti concentrations, were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), nano indentation, a ball-on-disk tribometer, a four-point probe system and dynamic anodic testing. As a result, the optimum composition of Ti in Ti-doped DLC: H film using our hybrid method was found to be a Ti content of 18 at. %, having superior electrical conductivity and high corrosion resistance, suitable for bipolar plates. Its hardness value was measured to be 25.6GPa with a low friction factor. (C) 2017 The Japan Society of Applied Physics | en_US |
dc.description.sponsorship | This work was supported by the Industrial Technology Innovation Program of the Korea Evaluation Institute of Industrial Technology (KEIT) granted financial resource from the Ministry of Trade, Industry and Energy, Republic of Korea (No. 10062510) and the Human Resources Development program (No. 20154030200680) of the Korea Institute of Energy Technology Evaluation and Planning (KETEP) grant funded by the Korean government Ministry of Trade, Industry and Energy. This work was supported by the Convergence Technology Development (No. S2148121) funded by the Small and Medium Business Administration (SMBA, Korea). | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | IOP PUBLISHING LTD | en_US |
dc.subject | PULSED-LASER DEPOSITION | en_US |
dc.subject | DLC FILMS | en_US |
dc.subject | TRIBOLOGICAL PROPERTIES | en_US |
dc.subject | ELECTRICAL-PROPERTIES | en_US |
dc.subject | MECHANICAL-PROPERTIES | en_US |
dc.subject | AMORPHOUS-CARBON | en_US |
dc.subject | ATOMIC-STRUCTURE | en_US |
dc.subject | BIAS VOLTAGE | en_US |
dc.subject | THIN-FILMS | en_US |
dc.subject | EVAPORATION | en_US |
dc.title | Ti-doped hydrogenated diamond like carbon coating deposited by hybrid physical vapor deposition and plasma enhanced chemical vapor deposition | en_US |
dc.type | Article | en_US |
dc.relation.no | 3 | - |
dc.relation.volume | 56 | - |
dc.identifier.doi | 10.7567/JJAP.56.035506 | - |
dc.relation.page | 1-7 | - |
dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | - |
dc.contributor.googleauthor | Lee, Na Rae | - |
dc.contributor.googleauthor | Jun, Yee Sle | - |
dc.contributor.googleauthor | Moon, Kyoung Il | - |
dc.contributor.googleauthor | Lee, Caroline Sunyong | - |
dc.relation.code | 2017000941 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF ENGINEERING SCIENCES[E] | - |
dc.sector.department | DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING | - |
dc.identifier.pid | sunyonglee | - |
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