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GRADUATE SCHOOL[S](대학원)
BIONANOTECHNOLOGY(바이오나노학과)
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2014-01
Abrasive and additive interactions in high selectivity STI CMP slurries
박진구
2015-02
Effect of lanthanum doping in ceria abrasives on chemical mechanical polishing selectivity for shallow trench isolation
박진구
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High selectivity
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Amino acids
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Chemical Mechanical Planarization
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CMP
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Lanthanum
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2015
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2014
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