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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 11-20 of 301 (Search time: 0.002 seconds).
Item hits:
Issue Date
Title
Author(s)
2007-10
Process Extension Techniques for Optical Lithography: Thermal Treatment, Polarization and Double Patterning
오혜근
2006-02
EUV lithography simulation for the 32 nm node
오혜근
2006-02
Reflow modeling for elongated contact hole shape
오혜근
2006-02
Simulation of mask induced polarization effect on imaging in immersion lithography
오혜근
2006-02
Evaluation of partial coherent imaging using the transfer function in immersion lithography
오혜근
2007-06
Effective thickness and dielectric constant of interfacial layers of Pt∕Bi 3.15 Nd 0.85 Ti 3 O 12 ∕SrRuO 3 capacitors
강보수
2006-02
Dielectric properties of <001>-oriented Ba0.6Sr0.4TiO3 thin films on polycrystalline metal tapes using biaxially oriented MgO/γ-Al2O3 buffer layers
강보수
2006-02
Studies on the La substitution site in Bi4-xLaxTi3O12 by polarization-dependent x-ray absorption spectroscopy
강보수
2006-02
Numerical modeling of absorber characteristics for EUVL
오혜근
2006-02
Reflow modeling for elongated contact hole shape
홍주유
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-Author
94
정영대
89
오혜근
34
권영헌
31
정희준
27
강보수
10
김옥경
10
홍주유
3
손승우
2
권영현
1
권영일
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-Subject
15
Lithography
11
lithography
10
Lithography simulation
10
Resist reflow process
9
Navier-Stokes equation
7
resist reflow process
6
32 nm line and space half-pitch
6
Contact hole
5
ellipsometry
5
EUV lithography
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-Date issued
45
2009
68
2008
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2007
60
2006
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2005
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2004
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