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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 81-90 of 141 (Search time: 0.001 seconds).
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Issue Date
Title
Author(s)
2009-06
Investigation of Resolution Enhancement by Using Interferometric Immersion Lithography with a Lloyd Mirror
오혜근
2008-01
32 nm 1:1 Line and Space Patterning by Resist Reflow Process
오혜근
2007-04
The process latitude dependency on local photomask haze defect in 70 nm binary intensity mask
오혜근
2007-04
Resist Reflow Modeling Including Surface Tension and Bulk Effect
오혜근
2009-11
Heat conduction from hot plate to photoresist on top of wafer including heat loss to the environment
오혜근
2003-12
복합적인 레지스트 패턴 붕괴현상의 역학적 해석
오혜근
2003-12
거친 표면을 가진 흡수체와 버퍼의 측면에 의한 극자외선 산란효과
오혜근
2003-12
Ellipsometry 에서의 calibration 및 입사면 고정형 ellipsometer
오혜근
2003-03
Optical Properties of the SiO-Co Composite Thin Films
오혜근
2002-10
Bulk Image Formation of Scalar Modeling in a Photoresist
오혜근
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Lithography
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lithography
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ellipsometry
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Simulation
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Chemically amplified resist
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Lithography simulation
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Resist reflow process
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Aerial image
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EUV lithography
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