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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)
APPLIED PHYSICS(응용물리학과)
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Results 71-80 of 141 (Search time: 0.002 seconds).
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Issue Date
Title
Author(s)
2004-11
Bulk effects of the thermal flow resists
오혜근
2004-11
A study of process parameter control for nanopattern
오혜근
2004-11
Aerial image characterization for defects in an extreme-ultraviolet mask
오혜근
2004-12
극자외선 리소그래피에서 마스크 결함에 의한 이미지 특징
오혜근
2008-06
Aerial Image Characteristics of a Modified Absorber Model for Extreme Ultraviolet Lithography (EUVL)
오혜근
2007-01
Acid Diffusion Length Corresponding to Post Exposure Bake Time and Temperature
오혜근
2007-01
Theoretical investigation of pattern printability of oxidized Si and Ru capping models for extreme ultraviolet lithography (EUVL)
오혜근
2007-02
32 nm pattern collapse modeling with radial distance and rinse speed
오혜근
2007-02
Photoresist adhesion effect of resist reflow process
오혜근
2007-02
Characteristics and prevention of pattern collapse in EUV lithography
오혜근
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-Subject
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Lithography
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lithography
8
ellipsometry
7
Simulation
6
Chemically amplified resist
6
Lithography simulation
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Resist reflow process
5
Aerial image
5
EUV lithography
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EUV mask
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